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Fabrication of NOA microfluidic devices based on sequential replica molding

Authors
Sim, Jae HwanMoon, Hyun JuneRoh, Yoon HoJung, Hyun WookBong, Ki Wan
Issue Date
5월-2017
Publisher
KOREAN INSTITUTE CHEMICAL ENGINEERS
Keywords
NOA; UV Curable Resin; Microfluidics; Device Fabrication; Replica Molding
Citation
KOREAN JOURNAL OF CHEMICAL ENGINEERING, v.34, no.5, pp.1495 - 1499
Indexed
SCIE
SCOPUS
KCI
Journal Title
KOREAN JOURNAL OF CHEMICAL ENGINEERING
Volume
34
Number
5
Start Page
1495
End Page
1499
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/83554
DOI
10.1007/s11814-017-0041-1
ISSN
0256-1115
Abstract
Polydimethylsiloxane (PDMS) microfluidic devices, though they are commonly utilized in microfluidic applications, have several limitations, such as short-term modified surface condition, swelling in the presence of organic solvents, and deformation under high pressure or when built with low aspect ratios. To resolve the restrictions, Norland Optical Adhesive (NOA) has been introduced as an excellent alternative for PDMS. Here, we present a practical protocol for the fabrication of NOA microfluidic devices via a step-wise molding process. Through the indirect molding of NOA on wafers, the damage to the wafers can be significantly reduced. Furthermore, because we use positivepatterned wafers, which are commonly used to fabricate PDMS devices, no additional fabrication of the wafer is required. This simple strategy thus avoids damage to the wafers and simultaneously allows for the mass production of NOA devices without deformation. We also test the performance of NOA devices in oil-in-water droplet production and in a microfluidic process using organic solvents.
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