Extraordinary Figure-of-Merit of Magnetic Resonance from Ultrathin Silicon Nanohole Membrane as All-Dielectric Metamaterial
- Authors
- Park, Sang-Gil; Lee, Youngseop; Kwon, Seyong; Yoo, SeokJae; Park, Q-Han; Park, Je-Kyun; Jeong, Ki-Hun
- Issue Date
- 2월-2017
- Publisher
- WILEY-V C H VERLAG GMBH
- Keywords
- biomolecules; high sensitivity; label-free sensing; refractive index changes; silicon metamaterials
- Citation
- ADVANCED OPTICAL MATERIALS, v.5, no.3
- Indexed
- SCIE
SCOPUS
- Journal Title
- ADVANCED OPTICAL MATERIALS
- Volume
- 5
- Number
- 3
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/84743
- DOI
- 10.1002/adom.201600628
- ISSN
- 2195-1071
- Abstract
- Metamaterial allows novel nanophotonic applications such as negative permeability, negative refractive index, and near-zero index. In particular, all-dielectric metamaterials recently create new opportunities for manipulating electromagnetic fields, taking full advantage of low-loss, bandwidth enhancement, and isotropic responses. Here a silicon dielectric metamaterial is reported in near-infrared region, exhibiting extraordinarily figure-ofmerit, defined by sensitivity (resonance shift/refractive index change) over full width at half maximum, from magnetic resonance shift depending on index changes of surrounding medium. This silicon dielectric metamaterial comprises subwavelength nanohole arrays in a square lattice on an ultrathin amorphous silicon membrane. The ultrathin silicon nanohole membrane is fabricated on a glass wafer by using e-beam lithography, silicon reactive ion etching, and hydrogen fluoride wet etching. This all-dielectric metamaterial successfully demonstrates exceptional figure-of-merit of 29, which is 7.6 times higher than those values of conventional metamaterials. This novel metamaterial enables not only the label-free detection of chemical and biological molecules with different mass concentrations but also the in situ reaction monitoring of biochemical molecules.
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Collections - College of Science > Department of Physics > 1. Journal Articles
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