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A Frontside Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber for NDIR CO2 Gas Sensors

Kwon, Kwang-Ho

ConferenceCitationAsia-Pacific Conference On Transducers and Micro-Nano TechnologyPublisherAPCOT 2008PlaceCH
Etching Mechanism of ZnO films using Inductively Coupled HBr/Ar Plasma

Kwon, Kwang-Ho

ConferenceCitation30th International Symposium on Dry ProcessPublisherDPS 2008PlaceJA
Etching Mechanism of ZnO films using Inductively Coupled HBr/Ar Plasma

Kwon, Kwang-Ho

ConferenceCitation1st International Conference on Microelectronics and plasma TechnologyPublisherICMAP 2008PlaceKO
Design, Fabrication and Characterization of Front-side Dry-Etched Microbridge Structure Thermopile with 3-5 ㎛Infrared Absorber

Kwon, Kwang-Ho

ConferenceCitation30th International Symposium on Dry ProcessPublisherDPS 2008PlaceJA
Fabrication of High-Speed Polyimide-based Humidity Sensor Using Anisotropic and Isotropic Etching With ICP

Kwon, Kwang-Ho

ConferenceCitation1st International Conference on Microelectronics and plasma TechnologyPublisherICMAP 2008PlaceKO
A Locally Cured Polyimide-based Humidity Sensor with High Sensitivity and High Speed

Kwon, Kwang-Ho

ConferenceCitation2008 THE SEVENTH IEEE CONFERENCE ON SENSORSPublisherIEEE Sensors in ITaly, 2008PlaceIT
Flexible amperometric biosensors using plasma functionalized multiwall carbon nanotube-polymer composites

Kwon, Kwang-Ho

ConferenceCitationMRS 2008 Spring Meeting in San Francisco, USPublisherEuropean Materials Research SocietyPlaceUS
A Front-side Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber and Its Application to Novel NDIR CO2 Gas Sensors

Kwon, Kwang-Ho

ConferenceCitationTHE SEVENTH IEEE CONFERENCE ON SENSORSPublisherIEEE Sensors in ITaly, 2008PlaceIT
The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process

Kwon, Kwang-Ho

ConferenceCitation1st International Conference on Microelectronics and plasma TechnologyPublisherICMAP 2008PlaceKO; 서울
Etching Characteristics and Mechanism of VO2 in inductively coupled plasma

Kwon, Kwang-Ho

ConferenceIssue Date2008CitationThe 4th Asia Pacific Conference on Transducers and Micro/Nano Technology, pp.71PublisherCenter for Frontier Materials and Micro/Nano Science and Technology, NCKUPlaceCH; tainan, Taiwan
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