Formation of Flexible and Transparent Indium Gallium Zinc Oxide/Ag/Indium Gallium Zinc Oxide Multilayer Film
DC Field | Value | Language |
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dc.contributor.author | Kim, Jun Ho | - |
dc.contributor.author | Kim, Da-Som | - |
dc.contributor.author | Kim, Sun-Kyung | - |
dc.contributor.author | Yoo, Young-Zo | - |
dc.contributor.author | Lee, Jeong Hwan | - |
dc.contributor.author | Kim, Sang-Woo | - |
dc.contributor.author | Seong, Tae-Yeon | - |
dc.date.accessioned | 2021-09-03T21:25:47Z | - |
dc.date.available | 2021-09-03T21:25:47Z | - |
dc.date.created | 2021-06-18 | - |
dc.date.issued | 2016-08 | - |
dc.identifier.issn | 0361-5235 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/87917 | - |
dc.description.abstract | In this study, the electrical, optical, and bending characteristics of amorphous indium gallium zinc oxide (IGZO)/Ag/IGZO (39 nm/19 nm/39 nm) multilayer films deposited on polyethylene terephthalate (PET) substrate at room temperature were investigated and compared with those of Sn-doped indium oxide (ITO) (100 nm thick) films. At 500 nm the ITO film transmitted 91.3% and the IGZO/Ag/IGZO multilayer film transmitted 88.8%. The calculated transmittance spectrum of the multilayer film was similar to the experimental result. The ITO film and IGZO/Ag/IGZO multilayer film, respectively, showed carrier concentrations of 1.79 x 10(20) and 7.68 x 10(21) cm(-3) and mobilities of 27.18 cm(2)/V s and 18.17 cm(2)/V s. The ITO film had a sheet resistance of 134.9 Omega/sq and the IGZO/Ag/IGZO multilayer film one of 5.09 Omega/sq. Haacke's figure of merit (FOM) was calculated to be 1.94 x 10(-3) for the ITO film and 45.02 x 10(-3) Omega(-1) for the IGZO/Ag/IGZO multilayer film. The resistance change of 100 nm-thick ITO film was unstable even after five cycles, while that of the IGZO/Ag/IGZO film was constant up to 1000 cycles. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | SPRINGER | - |
dc.subject | MECHANICAL INTEGRITY | - |
dc.subject | ELECTRODES | - |
dc.subject | TRANSMITTANCE | - |
dc.subject | OPTIMIZATION | - |
dc.subject | RESISTANCE | - |
dc.subject | DISPLAYS | - |
dc.subject | DEVICES | - |
dc.subject | FIGURE | - |
dc.subject | MERIT | - |
dc.title | Formation of Flexible and Transparent Indium Gallium Zinc Oxide/Ag/Indium Gallium Zinc Oxide Multilayer Film | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Seong, Tae-Yeon | - |
dc.identifier.doi | 10.1007/s11664-016-4612-4 | - |
dc.identifier.scopusid | 2-s2.0-84966697291 | - |
dc.identifier.wosid | 000378873900060 | - |
dc.identifier.bibliographicCitation | JOURNAL OF ELECTRONIC MATERIALS, v.45, no.8, pp.4265 - 4269 | - |
dc.relation.isPartOf | JOURNAL OF ELECTRONIC MATERIALS | - |
dc.citation.title | JOURNAL OF ELECTRONIC MATERIALS | - |
dc.citation.volume | 45 | - |
dc.citation.number | 8 | - |
dc.citation.startPage | 4265 | - |
dc.citation.endPage | 4269 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | MECHANICAL INTEGRITY | - |
dc.subject.keywordPlus | ELECTRODES | - |
dc.subject.keywordPlus | TRANSMITTANCE | - |
dc.subject.keywordPlus | OPTIMIZATION | - |
dc.subject.keywordPlus | RESISTANCE | - |
dc.subject.keywordPlus | DISPLAYS | - |
dc.subject.keywordPlus | DEVICES | - |
dc.subject.keywordPlus | FIGURE | - |
dc.subject.keywordPlus | MERIT | - |
dc.subject.keywordAuthor | InGaZnO | - |
dc.subject.keywordAuthor | Ag | - |
dc.subject.keywordAuthor | multilayer | - |
dc.subject.keywordAuthor | transparent conducting electrode | - |
dc.subject.keywordAuthor | flexible | - |
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