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Multilayer piezoelectric haptic actuator with CuO-modified PZT-PZNN ceramics

Authors
Seo, In-TaeLee, Tae-GonKim, Dae-HyeonHur, JoonKim, Jong-HyunNahm, SahnRyu, JunghoChoi, Byung-Yul
Issue Date
1-2월-2016
Publisher
ELSEVIER SCIENCE SA
Keywords
Piezoelectric; Actuator; Haptic; Multi-layer; PZT-based ceramics
Citation
SENSORS AND ACTUATORS A-PHYSICAL, v.238, pp.71 - 79
Indexed
SCIE
SCOPUS
Journal Title
SENSORS AND ACTUATORS A-PHYSICAL
Volume
238
Start Page
71
End Page
79
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/89563
DOI
10.1016/j.sna.2015.12.012
ISSN
0924-4247
Abstract
A piezoelectric haptic actuator composed of a multilayered ceramic (MLC) of 0.5 mol% CuO-modified 0.69Pb(Zr0.47Ti0.53)O-3-0.31[Pb(Zn0.4Ni0.6)(1/3)Nb-2/3]O-3 (0.5CPZT-PZNN) ceramic was developed and characterized. The 0.5CPZT-PZNN ceramic was well-sintered at 900 degrees C. This ceramic showed a small epsilon(T)33/epsilon(0) of 1801 and a large d(33) of 570 pC/N, necessary characteristics for high-performance actuators operating at low voltages. This ceramic also showed a high field-induced strain, maintained after 10(6) fatigue cycles. A three-layer MLC was synthesized at 900 degrees C using this ceramic. Ag metal was used as the electrode for the MLC actuator. No inter diffusion between the Ag electrode and the 0.5CPZT-PZNN ceramic layer was observed. The MLC actuator exhibited a high free stroke of 300 +/-mu m even after 10(6) bending cycles. The piezoelectric haptic actuator fabricated using this MLC showed a large vibration acceleration of 2.1 G with a low capacitance of 20 nF. This demonstrates the suitability of the 0.5CPZT-PZNN ceramic for applications in piezoelectric haptic actuator. (C) 2015 Elsevier B.V. All rights reserved.
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