Direct patterning process for tungsten trioxide nano-to-micro structures
- Authors
- Moon, Sungjin; Choi, Hak-Jong; Jun, Junho; Huh, Daihong; Kim, Chaehyun; Lee, Hee-Chul; Lee, Heon
- Issue Date
- 2016
- Publisher
- TAYLOR & FRANCIS INC
- Keywords
- Tungsten trioxide (WO3); nanoparticle-dispersed resin; nano-to-micro structure; direct imprinting; photo-electrochemical cell; photocurrent
- Citation
- APPLIED SPECTROSCOPY REVIEWS, v.51, no.7-9, pp.582 - 591
- Indexed
- SCIE
SCOPUS
- Journal Title
- APPLIED SPECTROSCOPY REVIEWS
- Volume
- 51
- Number
- 7-9
- Start Page
- 582
- End Page
- 591
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/90105
- DOI
- 10.1080/05704928.2016.1166372
- ISSN
- 0570-4928
- Abstract
- Compared to conventional and complex processes, including deposition, photolithography, and plasma-etching processes, WO3 nano-to-micro structures were successfully fabricated using direct imprinting process using WO3 nanoparticle-dispersed resin and consecutive annealing on any substrates in a simpler and more cost-effective manner. WO3 nanoparticle dispersed resins with various concentrations were evaluated for direct imprinting of WO3. The pattern fidelity and the surface morphology of imprinted WO3 nano-to-micro structures were characterized with field emission SEM. X-ray diffractionpattern was used to investigate the effect of annealing process on crystallinity of WO3 nano-to-micro structures. The crystal structure of imprinted WO3 was transformed from a hexagonal phase into a monoclinic phase by annealing. Optical transmittance of WO3 structures were also investigated using UV-vis spectroscopy. It was confirmed that diffused transmittance of WO3 structures could be increased up to 70% at 550 nm of wavelength without noticeable reduction of total transmittance, which is potentially applicable in the field of optoelectronic devices. Photo-electrochemical cells made of imprinted WO3 structure were properly operated.
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Collections - College of Engineering > Department of Materials Science and Engineering > 1. Journal Articles
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