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In Situ Nanolithography with Sub-10 nm Resolution Realized by Thermally Assisted Spin-Casting of a Self-Assembling Polymer

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dc.contributor.authorLee, Jung Hye-
dc.contributor.authorKim, YongJoo-
dc.contributor.authorCho, Joong-Yeon-
dc.contributor.authorYang, Se Ryeun-
dc.contributor.authorKim, Jong Min-
dc.contributor.authorYim, Soonmin-
dc.contributor.authorLee, Heon-
dc.contributor.authorJung, Yeon Sik-
dc.date.accessioned2021-09-04T12:47:25Z-
dc.date.available2021-09-04T12:47:25Z-
dc.date.created2021-06-18-
dc.date.issued2015-09-02-
dc.identifier.issn0935-9648-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/92511-
dc.description.abstractIn situ nanolithography is realized based on warm spin-casting of block copolymer solutions. This advancement is based on Si-containing block copolymers with an appropriate thermodynamic driving force for spontaneous phase-separation combined with the thermal assistance provided by slight temperature elevations during the spin-casting. Sub-10 nm half-pitch nanoscale patterns are produced within 30 s without a separate annealing process.-
dc.languageEnglish-
dc.language.isoen-
dc.publisherWILEY-V C H VERLAG GMBH-
dc.subjectBLOCK-COPOLYMERS-
dc.subjectIMPRINT LITHOGRAPHY-
dc.subjectARRAYS-
dc.subjectGRAPHOEPITAXY-
dc.subjectNANOSTRUCTURES-
dc.subjectPOLYSTYRENE-
dc.subjectORIENTATION-
dc.subjectTEMPERATURE-
dc.subjectPATTERNS-
dc.subjectPHASE-
dc.titleIn Situ Nanolithography with Sub-10 nm Resolution Realized by Thermally Assisted Spin-Casting of a Self-Assembling Polymer-
dc.typeArticle-
dc.contributor.affiliatedAuthorLee, Heon-
dc.identifier.doi10.1002/adma.201501363-
dc.identifier.scopusid2-s2.0-84940666281-
dc.identifier.wosid000360721600001-
dc.identifier.bibliographicCitationADVANCED MATERIALS, v.27, no.33, pp.4814 - 4822-
dc.relation.isPartOfADVANCED MATERIALS-
dc.citation.titleADVANCED MATERIALS-
dc.citation.volume27-
dc.citation.number33-
dc.citation.startPage4814-
dc.citation.endPage4822-
dc.type.rimsART-
dc.type.docTypeArticle-
dc.description.journalClass1-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaChemistry-
dc.relation.journalResearchAreaScience & Technology - Other Topics-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaPhysics-
dc.relation.journalWebOfScienceCategoryChemistry, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryChemistry, Physical-
dc.relation.journalWebOfScienceCategoryNanoscience & Nanotechnology-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalWebOfScienceCategoryPhysics, Condensed Matter-
dc.subject.keywordPlusBLOCK-COPOLYMERS-
dc.subject.keywordPlusIMPRINT LITHOGRAPHY-
dc.subject.keywordPlusARRAYS-
dc.subject.keywordPlusGRAPHOEPITAXY-
dc.subject.keywordPlusNANOSTRUCTURES-
dc.subject.keywordPlusPOLYSTYRENE-
dc.subject.keywordPlusORIENTATION-
dc.subject.keywordPlusTEMPERATURE-
dc.subject.keywordPlusPATTERNS-
dc.subject.keywordPlusPHASE-
dc.subject.keywordAuthorblock copolymers-
dc.subject.keywordAuthordirected self-assembly-
dc.subject.keywordAuthorsub-10 nm-
dc.subject.keywordAuthorwarm spin-casting-
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