Highly Sensitive H2S Sensor Based on the Metal-Catalyzed SnO2 Nanocolumns Fabricated by Glancing Angle Deposition
- Authors
- Yoo, Kwang Soo; Han, Soo Deok; Moon, Hi Gyu; Yoon, Seok-Jin; Kang, Chong-Yun
- Issue Date
- 7월-2015
- Publisher
- MDPI
- Keywords
- H2S sensor; nanosensor; SnO2 nanocolumn; glancing angle deposition
- Citation
- SENSORS, v.15, no.7, pp.15468 - 15477
- Indexed
- SCIE
SCOPUS
- Journal Title
- SENSORS
- Volume
- 15
- Number
- 7
- Start Page
- 15468
- End Page
- 15477
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/93098
- DOI
- 10.3390/s150715468
- ISSN
- 1424-8220
- Abstract
- As highly sensitive H2S gas sensors, Au- and Ag-catalyzed SnO2 thin films with morphology-controlled nanostructures were fabricated by using e-beam evaporation in combination with the glancing angle deposition (GAD) technique. After annealing at 500 degrees C for 40 h, the sensors showed a polycrystalline phase with a porous, tilted columnar nanostructure. The gas sensitivities (S = R-gas/R-air) of Au and Ag-catalyzed SnO2 sensors fabricated by the GAD process were 0.009 and 0.015, respectively, under 5 ppm H2S at 300 degrees C, and the 90% response time was approximately 5 s. These sensors showed excellent sensitivities compared with the SnO2 thin film sensors that were deposited normally (glancing angle = 0 degrees, S = 0.48).
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Collections - Graduate School > KU-KIST Graduate School of Converging Science and Technology > 1. Journal Articles
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