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Negative-Tone Block Copolymer Lithography by In Situ Surface Chemical Modification

Authors
Kim, Bong HoonByeon, Kyeong-JaeKim, Ju YoungKim, JinseungJin, Hyeong MinCho, Joong-YeonJeong, Seong-JunShin, JonghwaLee, HeonKim, Sang Ouk
Issue Date
29-10월-2014
Publisher
WILEY-V C H VERLAG GMBH
Keywords
self-assembly; block copolymers; imprint; lithography
Citation
SMALL, v.10, no.20, pp.4207 - 4212
Indexed
SCIE
SCOPUS
Journal Title
SMALL
Volume
10
Number
20
Start Page
4207
End Page
4212
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/97047
DOI
10.1002/smll.201400971
ISSN
1613-6810
Abstract
Negative-tone block copolymer (BCP) lithography based on in situ surface chemical modification is introduced as a highly efficient, versatile self-assembled nanopatterning. BCP blends films consisting of end-functionalized low molecular weight poly(styrene-ran-methyl methacrylate) and polystyrene-block-Poly(methyl methacylate) can produce surface vertical BCP nanodomains on various substrates without prior surface chemical treatment. Simple oxygen plasma treatment is employed to activate surface functional group formation at various substrates, where the end-functionalized polymers can be covalently bonded during the thermal annealing of BCP thin films. The covalently bonded brush layer mediates neutral interfacial condition for vertical BCP nanodomain alignment. This straightforward approach for high aspect ratio, vertical self-assembled nanodomain formation facilitates single step, site-specific BCP nanopatterning widely useful for various substrates. Moreover, this approach is compatible with directed self-assembly approaches to produce device oriented laterally ordered nanopatterns.
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공과대학 (신소재공학부)
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