Effect of Basal-plane Stacking Faults on X-ray Diffraction of Non-polar (11(2)over-bar0) a-plane GaN Films Grown on (1(1)over-bar02) r-plane Sapphire Substrates

Abstract

We report the effect of basal-plane stacking faults (BSFs) on X-ray diffraction (XRD) of non-polar (11 (2) over bar0) a-plane GaN films with different SiNx interlayers. Complete SiNx coverage and increased three-dimensional (3D) to two-dimensional (2D) transition stages substantially reduce BSF density. It was revealed that the Si-doping profile in the Si-doped GaN layer was unaffected by the introduction of a SiNx interlayer. The smallest in-plane anisotropy of the (11 (2) over bar0) XRD omega-scan widths w as found in the sample with multiple SiNx layers, and this finding can be attributed to the relatively isotropic GaN mosaic resulting from the increase in the 3D-2D growth step. Williamson-Hall (WH) analysis of the (h0 (h) over bar0) series of diffractions was employed to determine the c-axis lateral coherence length (LCL) and to estimate the mosaic tilt. The c-axis LCLs obtained from WH analyses of the present study's representative a-plane GaN samples were well correlated with the BSF-related results from both the off-axis XRD omega-scan and transmission electron microscopy (TEM). Based on WH and TEM analyses, the trends in BSF densities were very similar, even though the BSF densities extracted from LCLs indicated that the values were reduced by a factor of about twenty.