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A Short-Channel TFT of Amorphous In-Ga-Zn-O Semiconductor Pixel Structure With Advanced Five-Mask Process

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dc.contributor.authorYang, Joon-Young-
dc.contributor.authorJung, Sung-Hoon-
dc.contributor.authorWoo, Chang-Seung-
dc.contributor.authorLee, Ju-Hyun-
dc.contributor.authorPark, Jung-Ho-
dc.contributor.authorJun, Myung-Chul-
dc.contributor.authorKang, In-Byeong-
dc.contributor.authorYeo, Sang-Deog-
dc.date.accessioned2021-09-05T04:58:08Z-
dc.date.available2021-09-05T04:58:08Z-
dc.date.created2021-06-15-
dc.date.issued2014-10-
dc.identifier.issn0741-3106-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/97359-
dc.description.abstractWe propose a new five-mask etch-stopper amorphous In-Ga-Zn-O semiconductor pixel structure for a high-resolution advanced-high-performance in-plane-switching (AH-IPS) display device. A short-channel length (under 5 mu m) thin-film transistor (TFT) was successfully fabricated using a self-aligned damage preventing layer. The linear field effect mobility of the 4-mu m channel length TFT was 10.4 cm(2)/V.s. Using the proposed structure, we successfully fabricated a 9.7-in AH-IPS quad-extended graphics array liquid-crystal displays panel.-
dc.languageEnglish-
dc.language.isoen-
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC-
dc.subjectTHIN-FILM TRANSISTORS-
dc.titleA Short-Channel TFT of Amorphous In-Ga-Zn-O Semiconductor Pixel Structure With Advanced Five-Mask Process-
dc.typeArticle-
dc.contributor.affiliatedAuthorPark, Jung-Ho-
dc.identifier.doi10.1109/LED.2014.2349902-
dc.identifier.scopusid2-s2.0-84907674278-
dc.identifier.wosid000343011300023-
dc.identifier.bibliographicCitationIEEE ELECTRON DEVICE LETTERS, v.35, no.10, pp.1043 - 1045-
dc.relation.isPartOfIEEE ELECTRON DEVICE LETTERS-
dc.citation.titleIEEE ELECTRON DEVICE LETTERS-
dc.citation.volume35-
dc.citation.number10-
dc.citation.startPage1043-
dc.citation.endPage1045-
dc.type.rimsART-
dc.type.docTypeArticle-
dc.description.journalClass1-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaEngineering-
dc.relation.journalWebOfScienceCategoryEngineering, Electrical & Electronic-
dc.subject.keywordPlusTHIN-FILM TRANSISTORS-
dc.subject.keywordAuthora-IGZO-
dc.subject.keywordAuthorAMOLED-
dc.subject.keywordAuthoretch-stopper-
dc.subject.keywordAuthorLCD-
dc.subject.keywordAuthoroxide semiconductor-
dc.subject.keywordAuthorshort channel-
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