Double-layer effect on electrothermal properties of transparent heaters
- Authors
- Kim, A-Young; Lee, Kyuha; Park, Ji Hun; Byun, Dongjin; Lee, Joong Kee
- Issue Date
- 8월-2014
- Publisher
- WILEY-V C H VERLAG GMBH
- Keywords
- double-layer thin films; transparent conducting oxide; transparent heater
- Citation
- PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, v.211, no.8, pp.1923 - 1927
- Indexed
- SCIE
SCOPUS
- Journal Title
- PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
- Volume
- 211
- Number
- 8
- Start Page
- 1923
- End Page
- 1927
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/97801
- DOI
- 10.1002/pssa.201330517
- ISSN
- 1862-6300
- Abstract
- Transparent double-layer heaters that consist of aluminum-doped zinc oxide and fluorine-doped tin oxide films are prepared by electron cyclotron resonance-metal organic chemical vapor deposition and RF-sputtering systems, in sequence. The double-layered transparent conducting oxide film is designed and prepared to achieve both of high conductivity and high-temperature performance. This double-layer structure has lower sheet resistance, due to the grain size increase with respect to the single-layer films. The fluorine-doped tin oxide/aluminum-doped zinc oxide double-layer film shows a sheet resistance as low as 36.7 Omega sq(-1), and an optical transmittance of similar to 82%, which are suitable properties for low-voltage transparent heaters. Hall measurement results show that the double-layer film has remarkably increased conductivity and decreased resistivity. In addition, the time-versus-temperature profile shows that the performance of the fluorine-doped tin oxide/aluminum-doped zinc oxide double layer is superior to that of the aluminum-doped zinc oxide and fluorine-doped tin oxide single-layer films. (C) 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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