상세 보기
The effect of heat treatments on the electron emission of amorphous carbon film deposited by RF magnetron sputtering method
- 제목
- The effect of heat treatments on the electron emission of amorphous carbon film deposited by RF magnetron sputtering method
- 저자
- Ju, Byeongkwon
- 학회명
- 제7회 반도체 학술대회
- 학회 개최일
- 2000-01-26 ~ 2000-01-28