The effect of heat treatments on the electron emission of amorphous carbon film deposited by RF magnetron sputtering method

제목
The effect of heat treatments on the electron emission of amorphous carbon film deposited by RF magnetron sputtering method
저자
Ju, Byeongkwon
학회명
제7회 반도체 학술대회
학회 개최일
2000-01-26 ~ 2000-01-28