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Evaluation of Properties of GaN by Growth Conditions of AlN Buffer Layer Using Mass-Production Sputtering Equipment
Evaluation of Properties of GaN by Growth Conditions of AlN Buffer Layer Using Mass-Production Sputtering Equipment
- 제목
- Evaluation of Properties of GaN by Growth Conditions of AlN Buffer Layer Using Mass-Production Sputtering Equipment
- 제목 (타언어)
- Evaluation of Properties of GaN by Growth Conditions of AlN Buffer Layer Using Mass-Production Sputtering Equipment
- 저자
- BYUN, Dong Jin
- 발행일
- 2018-05-17
- 학회명
- 2018년도 한국재료학회 춘계학술대회
- 개최국가
- 대한민국
- 학회 개최일
- 2018-05-16 ~ 2018-05-18