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Selective formation of one and two dimensionally arrayed InGaAs quantum dots using Ga₂O₃ thin film as a mask material

  • PARK, JUNG HO
제목
Selective formation of one and two dimensionally arrayed InGaAs quantum dots using Ga₂O₃ thin film as a mask material
저자
PARK, JUNG HO
학회명
제5회 반도체 학술대회 논문집
개최지
제5회 반도체 학술대회 논문집
학회 개최일
1998-03-01

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