High Performance & Stability of Nano-Crystalline Silicon Thin-Film Base TFTs by Hyper-Thermal Neutral Beam Assisted Chemical Vapour Deposition at Low Temperature

제목
High Performance & Stability of Nano-Crystalline Silicon Thin-Film Base TFTs by Hyper-Thermal Neutral Beam Assisted Chemical Vapour Deposition at Low Temperature
저자
Hong MunPyo
학회명
7th Inernational Thin-Film Transistor Confernce(ITC2011)
개최국가
영국
학회 개최일
2011-03-03 ~ 2011-03-04