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nanocrystalline silicon thin films deposited by rf-magnetron sputtering

  • Jonghun Lyou
제목
nanocrystalline silicon thin films deposited by rf-magnetron sputtering
저자
Jonghun Lyou
학회명
Bulletin of the Korean Physical Society
개최지
Bulletin of the Korean Physical Society
학회 개최일
2002-10-24

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