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Electrical properties of e-beam exposed silicon dioxides and their application to nano devices

  • PARK, JUNG HO
제목
Electrical properties of e-beam exposed silicon dioxides and their application to nano devices
저자
PARK, JUNG HO
학회명
Proceeding of Microprocesses and Nanotechnology Conference
개최지
Proceeding of Microprocesses and Nanotechnology Conference
학회 개최일
1998-01-01

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