Fabrication and characterization of RF nanoantenna on a nanoliter-scale 3D microcontainer

초록

We report the design and fabrication of a nanoantenna structure on the surface of a 3D nanoliter-scale container for the development of communicable nanoliter-scale chemical delivery systems. The porous container was self-assembled, after which the nanoantenna was fabricated on the top of the microcontainer using focused ion beam (FIB) ion-induced metal deposition. The nanoantenna was structured as a rectangular metal coil composed of platinum (Pt) nanowires (70 nm in width). The response of the nanoantenna structure was simulated using finite element software and showed a strong resonant feature at 10.8 GHz, which was confirmed by high frequency measurements.

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