Effects of Pre-annealing on High-temperature Stability of ALD Al2O3 Passivation Layer

Effects of Pre-annealing on High-temperature Stability of ALD Al2O3 Passivation Layer
제목
Effects of Pre-annealing on High-temperature Stability of ALD Al2O3 Passivation Layer
제목 (타언어)
Effects of Pre-annealing on High-temperature Stability of ALD Al2O3 Passivation Layer
저자
Kang Yoon Mook
발행일
2019-03-13
학회명
GPVC 2019
개최국가
대한민국
학회 개최일
2019-03-13 ~ 2019-03-15