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Ionic properties of yttria stabilized zirconia (YSZ) fabricated by atomic layer deposition (ALD) with water, oxygen, and ozone
Ionic properties of yttria stabilized zirconia (YSZ) fabricated by atomic layer deposition (ALD) with water, oxygen, and ozone
- 제목
- Ionic properties of yttria stabilized zirconia (YSZ) fabricated by atomic layer deposition (ALD) with water, oxygen, and ozone
- 제목 (타언어)
- Ionic properties of yttria stabilized zirconia (YSZ) fabricated by atomic layer deposition (ALD) with water, oxygen, and ozone
- 저자
- Shim, Joon Hyung
- 발행일
- 2014-06-16
- 학회명
- The 14th Atomic Layer Deposition (ALD 2014)
- 개최국가
- 일본
- 학회 개최일
- 2014-06-15 ~ 2014-06-18