상세 보기
- 제목
- Surface-micromachined accelerometer using a movable polysilicon gate FET
- 저자
- Pak, James Jungho
- 학회명
- Proceedings of SPIE's Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS
- 개최지
- Proceedings of SPIE's Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS
- 학회 개최일
- 1997-12-11