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Pretreatment method by selective ion-implantation for epitaxial lateral overgrowth of GaN on patterned sapphire substrate
Pretreatment method by selective ion-implantation for epitaxial lateral overgrowth of GaN on patterned sapphire substrate
- 제목
- Pretreatment method by selective ion-implantation for epitaxial lateral overgrowth of GaN on patterned sapphire substrate
- 제목 (타언어)
- Pretreatment method by selective ion-implantation for epitaxial lateral overgrowth of GaN on patterned sapphire substrate
- 저자
- BYUN, Dong Jin
- 발행일
- 2016-08-25
- 학회명
- 20th International Vaccum Congress
- 개최국가
- 대한민국
- 학회 개최일
- 2016-08-21 ~ 2016-08-26