Fabrication of self-aligned silicon field emitters coated with diamond-like carbon

제목
Fabrication of self-aligned silicon field emitters coated with diamond-like carbon
저자
Ju, Byeongkwon
학회명
Technical Digest of 9’th International Vacuum Microelectronics Conference
학회 개최일
1996-07-10 ~ 1996-07-10