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Fabrication of self-aligned silicon field emitters coated with diamond-like carbon
- 제목
- Fabrication of self-aligned silicon field emitters coated with diamond-like carbon
- 저자
- Ju, Byeongkwon
- 학회명
- Technical Digest of 9’th International Vacuum Microelectronics Conference
- 학회 개최일
- 1996-07-10 ~ 1996-07-10