Resistive-switching behavior in Ti/Si3N4/Ti memory structures for ReRAM applications

Citations

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초록

In this paper, the resistive-switching behavior of Si3N4 films using nitride-related traps in Ti/Si3N4/Ti memory cells is reported. Bipolar resistive switching behavior was clearly observed at a low voltage of about +/- 2.5 V. Compared to Au/Si3N4/Ti memory cells, the set and reset current of Ti/Si3N4/Ti memory cells was decreased from 5 mu A and 1.5 mA to 40 nA and 1 mu A, respectively, at V-read = 0.1 V. In addition, Ti/Si3N4/Ti memory cells showed improved endurance characteristics over 2.7 x 10(3) cycles. (C) 2012 Elsevier B.V. All rights reserved.

키워드

Resistive switching memorySi3N4Space charge limited current
제목
Resistive-switching behavior in Ti/Si3N4/Ti memory structures for ReRAM applications
저자
Kim, Hee-DongAn, Ho-MyoungKim, Tae Geun
DOI
10.1016/j.mee.2012.07.052
발행일
2012-10
유형
Article
저널명
Microelectronic Engineering
98
페이지
351 ~ 354