Liquid CO2-based coating for dense CuInxGa1-xS2 film fabrication

  • Nursanto, Eduardus Budi
  • Park, Se Jin
  • Hwang, Yun Jeong
  • Kim, Jaehoon
  • Min, Byoung Koun
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초록

A liquid CO2 (l-CO2)-based coating technique is used for the pore-filling of a porous copper indium gallium sulfide (CuInxGa1-xS2, CIGS) film synthesized by a solution-based method. In the l-CO2-based coating, copper and indium precursors dissolved in l-CO2 are deposited on the porous copper indium gallium oxide film, followed by low-temperature sulfurization. After the high-temperature sulfurization of the deposited film with the l-CO2-based coating, a highly dense CIGS film with almost complete pore-filling is obtained. The use of an indium rich solution in l-CO2 leads to the formation of near stoichiometric ratio of Cu:(In + Ga) that improves the pore filling behavior. (C) 2016 Elsevier B.V. All rights reserved.

키워드

Liquid CO2CuInxGa1-xS2Pore-fillingSUPERCRITICAL CARBON-DIOXIDEMESOPOROUS TIO2 FILMREACTIVE DEPOSITIONCONFORMAL COPPERQUANTUM-DOTSSOLAR-CELLSNANOPARTICLESGROWTHCO2PD
제목
Liquid CO2-based coating for dense CuInxGa1-xS2 film fabrication
저자
Nursanto, Eduardus BudiPark, Se JinHwang, Yun JeongKim, JaehoonMin, Byoung Koun
DOI
10.1016/j.supflu.2016.05.023
발행일
2017-02
유형
Article; Proceedings Paper
저널명
Journal of Supercritical Fluids
120
페이지
453 ~ 459