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Influence of the process parameters on the surface resistance of the Cu/C films on polymer substrates prapared by at ambient temperature by ECR-CVD
- 제목
- Influence of the process parameters on the surface resistance of the Cu/C films on polymer substrates prapared by at ambient temperature by ECR-CVD
- 저자
- BYUN, Dong Jin
- 학회명
- Chemical Reaction Engineering
- 학회 개최일
- 2002-01-01 ~ 2002-01-02