Influence of the process parameters on the surface resistance of the Cu/C films on polymer substrates prapared by at ambient temperature by ECR-CVD

제목
Influence of the process parameters on the surface resistance of the Cu/C films on polymer substrates prapared by at ambient temperature by ECR-CVD
저자
BYUN, Dong Jin
학회명
Chemical Reaction Engineering
학회 개최일
2002-01-01 ~ 2002-01-02