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Crystal growth of Si and BP on Si substrates using B2H6-PH3-H2 system
- 제목
- Crystal growth of Si and BP on Si substrates using B2H6-PH3-H2 system
- 저자
- Ju, Byeongkwon
- 학회명
- International Symposium on the Physics of Semiconductor and its Application
- 학회 개최일
- 1986-06-10 ~ 1986-06-10