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A Novel Route to Nanostructured Patterns via Inductively Coupled Plasma Etching of Block Copolymer Templates on GaN layer

  • Kim, Ji Hyun
제목
A Novel Route to Nanostructured Patterns via Inductively Coupled Plasma Etching of Block Copolymer Templates on GaN layer
저자
Kim, Ji Hyun
학회명
Electronic Materials Conference
개최국가
미국
학회 개최일
2008-06-25 ~ 2008-06-27

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