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Novel deposition technology of nano-crystalline silicon thin film at low temperature by neutral beam assisted CVD system for the Flexible AM-OLED Backplane
- 제목
- Novel deposition technology of nano-crystalline silicon thin film at low temperature by neutral beam assisted CVD system for the Flexible AM-OLED Backplane
- 저자
- Hong MunPyo
- 발행일
- 2010-01-29
- 학회명
- International Thin-Film Transistor Conference 2010
- 개최지
- Egret Himeji, Japan
- 개최국가
- 일본
- 학회 개최일
- 2010-01-28 ~ 2010-01-29