Novel deposition technology of nano-crystalline silicon thin film at low temperature by neutral beam assisted CVD system for the Flexible AM-OLED Backplane

제목
Novel deposition technology of nano-crystalline silicon thin film at low temperature by neutral beam assisted CVD system for the Flexible AM-OLED Backplane
저자
Hong MunPyo
발행일
2010-01-29
학회명
International Thin-Film Transistor Conference 2010
개최지
Egret Himeji, Japan
개최국가
일본
학회 개최일
2010-01-28 ~ 2010-01-29