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Double Laser Crystallization (DLC) of pre-patterned amorphous silicon film and amorphous silicon film with a patterned assisting SIO2 layer
- 제목
- Double Laser Crystallization (DLC) of pre-patterned amorphous silicon film and amorphous silicon film with a patterned assisting SIO2 layer
- 저자
- Chung Jaewon
- 발행일
- 2004-07-13
- 학회명
- ASME Heat Transfer/Fluids Engineering Summer Conference 2004
- 개최지
- Charlotte, NC, United States
- 개최국가
- 미국
- 학회 개최일
- 2004-07-11 ~ 2004-07-15