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Characteristics of Ta2O5 and (1-x)Ta2O5-xTiO2 thin film at various annealing temperature by CVD
- 제목
- Characteristics of Ta2O5 and (1-x)Ta2O5-xTiO2 thin film at various annealing temperature by CVD
- 저자
- BYUN, Dong Jin
- 학회명
- Abstracts of The 12th Seoul, International Symposium on the Physics of Semiconductors and Applications(ISPSA-2004)
- 개최지
- Gyeongju, Korea
- 학회 개최일
- 2004-03-14 ~ 2004-03-16