New Approaches for overcoming Current Issues of Plasma Sputtering Process During Organic-electronics Device Fabrication: Plasma Damage Free and Room Temperature Process for High Quality Metal Oxide Thin Film

제목
New Approaches for overcoming Current Issues of Plasma Sputtering Process During Organic-electronics Device Fabrication: Plasma Damage Free and Room Temperature Process for High Quality Metal Oxide Thin Film
저자
Hong MunPyo
발행일
2012-02-09
학회명
제42회 동계학술대회
개최지
보광휘닉스파크(강원도평창)
개최국가
대한민국
학회 개최일
2012-02-08 ~ 2012-02-10