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Ultraviolet Stability of Al2O3 Layer Deposited on Crystalline Silicon Surface by Thermal Atomic Layer Deposition Method
Ultraviolet Stability of Al2O3 Layer Deposited on Crystalline Silicon Surface by Thermal Atomic Layer Deposition Method
- 제목
- Ultraviolet Stability of Al2O3 Layer Deposited on Crystalline Silicon Surface by Thermal Atomic Layer Deposition Method
- 제목 (타언어)
- Ultraviolet Stability of Al2O3 Layer Deposited on Crystalline Silicon Surface by Thermal Atomic Layer Deposition Method
- 저자
- Kang Yoon Mook
- 발행일
- 2017-03-15
- 학회명
- GPVC 2017
- 개최국가
- 대한민국
- 학회 개최일
- 2017-03-15 ~ 2017-03-17