Effects of the AlSb Buffer Layer and the InAs Channel Thickness on the Electrical Properties of InAs/AlSb-Based 2-DEG HEMT Structures

  • Shin, S. H.
  • Lim, J. Y.
  • Song, J. D.
  • Kim, H. J.
  • Han, S. H.
  • ... Kim, T. G.
Citations

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초록

In this study, the effects of various AlSb buffer layers and InAs channel thicknesses on the electrical properties of InAs/AlSb-based 2-dimensional-electron-gas (2-DEG) inverted-High Electron Mobility Transistor (HEMT) structures for applications to spin-Field Effective Transistor (FET) is reported. The optimized similar to 11-nm-thick InAs/AlSb HEMT on AlSb (0.5 mu m)/10 repetition of GaSb/AlSb superlattices/AlSb (1 mu m) shows noticeable values of the electron mobility (similar to 106,900 cm(2)/Vs at 77 K and 25,870 cm(2)/Vs at 300 K) and those are comparable to the state-of-the-art, considering impurity scattering due to doping.

키워드

Molecular beam epitaxyAlSbInAs2-DEGHEMTMOBILITY TRANSISTORSALSB/INAS HEMTSOHMIC CONTACTSINTERFACETRANSPORT
제목
Effects of the AlSb Buffer Layer and the InAs Channel Thickness on the Electrical Properties of InAs/AlSb-Based 2-DEG HEMT Structures
저자
Shin, S. H.Lim, J. Y.Song, J. D.Kim, H. J.Han, S. H.Kim, T. G.
발행일
2008-11
유형
Article
저널명
Journal of the Korean Physical Society
53
5
페이지
2719 ~ 2724