Preparation of Silicon Thin Film by Plasma Enhanced Chemical vapor Deposition as a High Capacity Anode for Lithium Polymer Batteries

제목
Preparation of Silicon Thin Film by Plasma Enhanced Chemical vapor Deposition as a High Capacity Anode for Lithium Polymer Batteries
저자
BYUN, Dong Jin
학회명
216th ECS Meeting
개최국가
오스트레일리아
학회 개최일
2009-10-04 ~ 2009-10-09