Characteristics of Ta2O5 thin film at various annealing temperature

제목
Characteristics of Ta2O5 thin film at various annealing temperature
저자
BYUN, Dong Jin
학회명
processing and properties of advanced engineering materials (Abstract of 2003 ISAEM The 3rd international symposium on designing)
개최지
Cheju, Korea
학회 개최일
2003-11-05 ~ 2003-11-08