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Characteristics of Ta2O5 thin film at various annealing temperature
- 제목
- Characteristics of Ta2O5 thin film at various annealing temperature
- 저자
- BYUN, Dong Jin
- 학회명
- processing and properties of advanced engineering materials (Abstract of 2003 ISAEM The 3rd international symposium on designing)
- 개최지
- Cheju, Korea
- 학회 개최일
- 2003-11-05 ~ 2003-11-08