Direct growth of SiC nanorods on Si using APCVD and single precursors

제목
Direct growth of SiC nanorods on Si using APCVD and single precursors
저자
BYUN, Dong Jin
학회명
Abstract of 2003 ISAEM The 3rd international symposium on designing, processing and properties of advanced engineering materials
학회 개최일
2003-01-01 ~ 2003-01-02