Experimental Analysis of the Process of Anodic Bonding using an Evaporated Glass Layer

  • Sung, Man Young
제목
Experimental Analysis of the Process of Anodic Bonding using an Evaporated Glass Layer
저자
Sung, Man Young
학회명
Mat. Res. Soc. Symp. Proc.
개최지
Mat. Res. Soc. Symp. Proc.
학회 개최일
1997-04-01