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Evaluation of Physical and Mechanical Properties of Al2O3 Thin Film Deposited on Transparent Polyimide Film by ALD at Low Temperature
Evaluation of Physical and Mechanical Properties of Al2O3 Thin Film Deposited on Transparent Polyimide Film by ALD at Low Temperature
- 제목
- Evaluation of Physical and Mechanical Properties of Al2O3 Thin Film Deposited on Transparent Polyimide Film by ALD at Low Temperature
- 제목 (타언어)
- Evaluation of Physical and Mechanical Properties of Al2O3 Thin Film Deposited on Transparent Polyimide Film by ALD at Low Temperature
- 저자
- Byoung-Ho Choi
- 발행일
- 2015-06-29
- 학회명
- ALD 2015
- 개최국가
- 미국
- 학회 개최일
- 2015-06-28 ~ 2015-07-01