Ion-implantation for Epitaxial Lateral Overgrowth of GaN on Patterned Sapphire Substrate

Ion-implantation for Epitaxial Lateral Overgrowth of GaN on Patterned Sapphire Substrate
제목
Ion-implantation for Epitaxial Lateral Overgrowth of GaN on Patterned Sapphire Substrate
제목 (타언어)
Ion-implantation for Epitaxial Lateral Overgrowth of GaN on Patterned Sapphire Substrate
저자
BYUN, Dong Jin
발행일
2014-11-13
학회명
The 18th International Conference on Accelerators and Beam Utilizations
개최국가
대한민국
학회 개최일
2014-11-12 ~ 2014-11-14