Degradation of dc characteristics of InAlN/GaN high electron mobility transistors by 5 MeV proton irradiation

  • Lo, Chien-Fong
  • Liu, L.
  • Kang, T. S.
  • Ren, Fan
  • Schwarz, C.
  • 외 9명
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초록

The dc characteristics of InAlN/GaN high electron mobility transistors were measured before and after irradiation with 5 MeV protons at doses up to 2 x 10(15) cm(-2). The on/off ratio degraded by two orders of magnitude for the highest dose, while the subthreshold slope increased from 77 to 122 mV/decade under these conditions. There was little change in transconductance or gate or drain currents for doses up to 2 x 10(13) cm(-2), but for the highest dose the drain current and transconductance decreased by, similar to 40% while the reverse gate current increased by a factor of similar to 6. The minority carrier diffusion length was around 1 mu m independent of proton dose. The InAlN/GaN heterostructure is at least as radiation hard as its AlGaN/GaN counterpart. (C) 2012 American Vacuum Society. [http://dx.doi.org/10.1116/1.3698402]

키워드

MGO
제목
Degradation of dc characteristics of InAlN/GaN high electron mobility transistors by 5 MeV proton irradiation
저자
Lo, Chien-FongLiu, L.Kang, T. S.Ren, FanSchwarz, C.Flitsiyan, E.Chernyak, L.Kim, Hong-YeolKim, JihyunYun, Sang PilLaboutin, O.Cao, Y.Johnson, J. W.Pearton, S. J.
DOI
10.1116/1.3698402
발행일
2012-05
유형
Article
저널명
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
30
3