A Millimeter-range Flexure-based Micropositioning Stage Using a Self-guided Amplifying Mechanism

제목
A Millimeter-range Flexure-based Micropositioning Stage Using a Self-guided Amplifying Mechanism
저자
Jaehwa Jeong
학회명
10th international conference of the european society for precision engieneering and nanotechnology
개최국가
네덜란드
학회 개최일
2010-05-31 ~ 2010-06-04