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Development of Light-Soaking Free Nano-Crystal Silicon Thin Film By Neutral Beam Assisted CVD Process at Room Temperature
- 제목
- Development of Light-Soaking Free Nano-Crystal Silicon Thin Film By Neutral Beam Assisted CVD Process at Room Temperature
- 저자
- Hong MunPyo
- 발행일
- 2011-10-12
- 학회명
- IMID2011(The 11th International Meeting on Information Display)
- 개최국가
- 대한민국
- 학회 개최일
- 2011-10-11 ~ 2011-10-14