Effects of Process Parameters on the Adhesion of Copper Film on Polyethylene Tetrephthalate(PET) Substrate Prepared by ECRMOCVD Coupled with a Periodic DC Bias

제목
Effects of Process Parameters on the Adhesion of Copper Film on Polyethylene Tetrephthalate(PET) Substrate Prepared by ECRMOCVD Coupled with a Periodic DC Bias
저자
BYUN, Dong Jin
학회명
2003 MRS Fall Meeting Proceedings
개최지
Boston, U.S.A
학회 개최일
2003-12-01 ~ 2003-12-05