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A Study on Short Channel Low Temperature Polycrystalline Si Transistors using Metal Induced Crystallization

  • Donghwan KIM
제목
A Study on Short Channel Low Temperature Polycrystalline Si Transistors using Metal Induced Crystallization
저자
Donghwan KIM
학회명
Joint Symposium of Electronic Materials
학회 개최일
2003-08-18 ~ 2003-08-14

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