The electrical and electron emission characteristics of diamond-like carbon film prepared onto Pt-coated silicon by plasma enhanced chemical vapor deposition

제목
The electrical and electron emission characteristics of diamond-like carbon film prepared onto Pt-coated silicon by plasma enhanced chemical vapor deposition
저자
Ju, Byeongkwon
학회명
MRS 1997 Fall Meeting
학회 개최일
1997-12-01 ~ 1997-12-05