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Zr-doped TiO2 Thin Films on RuO2 Substrate Grown by Atomic Layer Deposition

제목
Zr-doped TiO2 Thin Films on RuO2 Substrate Grown by Atomic Layer Deposition
저자
Jeong Sook Ha
학회명
2008 MRS Spring Meeting
개최국가
미국
학회 개최일
2008-03-24 ~ 2008-03-28

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