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NH3 effect on silicon oxynitride films grown at low temperature by
- 제목
- NH3 effect on silicon oxynitride films grown at low temperature by
- 저자
- Hong MunPyo
- 학회명
- 3rd International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials
- 개최국가
- 일본
- 학회 개최일
- 2011-03-06 ~ 2011-03-09