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Dependency of oxygen partial pressure on the characteristics of GAZO films grown by magnetron sputtering

  • Moon Byung-Moo
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Dependency of oxygen partial pressure on the characteristics of GAZO films grown by magnetron sputtering
저자
Moon Byung-Moo
학회명
한국전기전자재료학회 2011년도 하계학술대회
개최국가
대한민국
학회 개최일
2011-06-22 ~ 2011-06-24

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